Semiconductor process equipment supplier proves value of Exactus®

A leading semiconductor process equipment supplier needed superior temperature control for their newest equipment.  The company selected BASF’s Exactus pyrometry technology because they knew it would provide their equipment with exceptional optical temperature measurements.

BASF Exactus’ combination of wide measurement range, high speed, and excellent repeatability provided the chipmaker greater process control and system reliability. The Exactus product is based on BASF’s breakthrough optical temperature-sensing technology that eliminates error caused by fiber optic cables and utilizes proprietary circuitry to substantially increase sensitivity.

While designed for exacting semiconductor applications, BASF’s Exactus optical thermometers are suitable for a wide range of applications in other industries, including glass production, industrial heating, steel and medicine.

Exactus is a registered trademark for which BASF Catalysts LLC has rights.